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On-Demand Training - Calibre RET/OPC Basics

Description

This learning path will equip you with a basic understanding of Calibre nmOPC, OPCBIAS, nmSRAF, OPCVerify, and modeling basics; there are NO LABS.

12 month subscription
Access to cloud-based environment for hands-on lab exercises
Access to new training content added during the subscription period
Knowledge assessments to measure learning progress

Explore This On-Demand Training

Content Details

Starting at
USD $1400.00 / year
Buy

Chapters

learning path

Calibre RET/OPC Basics

This learning path will equip you with a basic understanding of Calibre nmOPC, OPCBIAS, nmSRAF, OPCVerify, and modeling basics; there are NO LABS.

Preview Chapter

Calibre OPCBIAS Training 1 – Syntax and Options

Calibre RET/OPC Basics 8 Chapters

This learning path will equip you with a basic understanding of Calibre nmOPC, OPCBIAS, nmSRAF, OPCVerify, and modeling basics; there are NO LABS.

1 Calibre OPCBIAS 5 Topics

Calibre OPCBIAS Training 1 – Syntax and Options
Calibre OPCBIAS Training 2 – Converting Bias Table to Rules
Calibre OPCBIAS Training 3 – Clean Up Process
Knowledge Check 1: Calibre OPCBIAS
Assessment: Calibre OPCBIAS

2 Calibre RET Modeling - Optical Model 13 Topics

Optical Model Training 1 – Optical modeling flow and optical parameter file
Optical Model Training 2 – General optical parameters & overview illumination source options
Knowledge Check 1: Calibre RET Modeling - Optical Model
Optical Model Training 3 – Illumination source options
Optical Model Training 4 – Optical kernel and diameter settings
Knowledge Check 2: Calibre RET Modeling - Optical Model
Optical Model Training 5 – Image and pupil parameter settings
Knowledge Check 3: Calibre RET Modeling - Optical Model
Optical Model Training 6 – How to invoke optical model tool and define illumination
Optical Model Training 7 – How To define kernel, image plane, pupil and film in optical model tool
Optical Model Training 8 – How to view optical source, kernel, and Jones Pupil in Calibre WORKbench
Knowledge Check 4: Calibre RET Modeling - Optical Model
Assessment: Calibre RET Modeling - Optical model

3 Calibre RET Modeling - Compact Resist Model 9 Topics

CM1 Model Training 1 – CM1 introduction and model parameters
CM1 Model Training 2 – CM1 model terms & CM1 center intro
CM1 Model Training 3 – CM1 model calibration flow & operating modes
CM1 Model Training 4 – Setting up model calibration in CM1 center – Part 1
Knowledge Check 1: Calibre RET Modeling - Compact Resist Model
CM1 Model Training 5 – Setting up model calibration in CM1 center – Part 2
CM1 Model Training 6 – Setting up model calibration in CM1 center – Part 3
Knowledge Check 2: Calibre RET Modeling - Compact Resist Model
Assessment: Calibre RET Modeling - Compact resist model

4 Calibre RET Modeling - VEB Etch Model 8 Topics

VEB Model Training 1 – Etch modeling basics & kernel options
VEB Model Training 2 – Model format & model-based retargeting
VEB Model Training 3 – Initial setup for VEB model calibration
Knowledge Check 1: Calibre RET Modeling - VEB Etch Model
VEB Model Training 4 – Setting up VEB optimization
VEB Model Training 5 – Setup file, analysis & run mode
Knowledge Check 2: Calibre RET Modeling - VEB Etch Model
Assessment: Calibre RET Modeling - VEB etch model

5 Calibre nmOPC 21 Topics

nmOPC Training 1 – Introduction
nmOPC Training 2 – Basic Elements in OPC Flow
nmOPC Training 3 – How to invoke nmOPC & recipe structure
nmOPC Training 4 – Layer and background definitions
Knowledge Check 1: Calibre nmOPC
nmOPC Training 5 – Setlayer command & OPC setup options
nmOPC Training 6 – Dense OPC options (part 1)
nmOPC Training 7 – Dense OPC options (part 2)
nmOPC Training 8 – OPC fragmentation overview & intrafeature fragmentation
nmOPC Training 9 – Interfeature & island fragmentation
Knowledge Check 2: Calibre nmOPC
nmOPC Training 10 – Fragment control & special fragmentation
nmOPC Training 11 – Iteration, EPE measurement & feedback control
nmOPC Training 12 – Edge movement & MRC control
Knowledge Check 3: Calibre nmOPC
nmOPC Training 13 – Scripting basics
nmOPC Training 14 – Process window OPC introduction & the use model
nmOPC Training 15 – Setting up models & process conditions in PWOPC
nmOPC Training 16 – Defining PWOPC iterations & tolerance constraints
Knowledge Check 4: Calibre nmOPC
Assessment: Calibre nmOPC

6 Calibre nmSRAF 10 Topics

SRAF Training 1 – Overview Calibre SRAF solutions
Knowledge Check 1: Calibre nmSRAF
SRAF Training 2 – Invoking nmSRAF & Creating SRAF templates
SRAF Training 3 – nmSRAF setup options (part 1)
Knowledge Check 2: Calibre nmSRAF
SRAF Training 4 – nmSRAF setup options (part 2)
SRAF Training 5 – Model-based SRAF insertion (part 1)
SRAF Training 6 – Model-based SRAF insertion (part 2)
Knowledge Check 3: Calibre nmSRAF
Assessment: Calibre nmSRAF

7 Calibre OPCverify 15 Topics

OPCverify Training 1 – Basic Recipe Setups
OPCverify Training 2 – Model and Layer Definitions
OPCverify Training 3 – OPCverify Setup Options & Setlayer Command Basics
OPCverify Training 4 – Pinch & Bridge Checks, Extra & Not Printing Checks
OPCverify Training 5 – Line End EPE checks
Knowledge Check 1: Calibre OPCverify
OPCverify Training 6 – Contact Coverage & Alignment Checks
OPCverify Training 7 – Poly End Cap & Gate CD Checks
OPCverify Training 8 – Measure CD & Contour Distance Checks
OPCverify Training 9 – PW Verification – Pvband Generation & Contour Difference Checks
OPCverify Training 10 – PW Verification – MEEF, NILS & DOF Checks
OPCverify Training 11 – OPCverify Output Options
OPCverify Training 12 – Error Classification Basics
Knowledge Check 2: Calibre OPCverify
Assessment: Calibre OPCverify

8 Calibre OPC Pro 11 Topics

Introduction
Basics of OPCpro LITHO setup file
OPCpro layer types & fragmentation
Fragmentation continued
Tagging & Sites
Edge Movement
User tagging & tag sets
Simulation tag commands
Tagging & optimizing simulation sites
WorkBench & RET Flow Tool demo
OPCpro mask rule constraints

1 Learning Paths

8 Chapters

92 Topics

17 Hours of Video

Outline

Receive unlimited access to all new content added during your active subscription.

During your subscription period, you will automatically receive access to all new content added to the library, including training on new product releases and technology updates to maximize your proficiency.

On-Demand Training - Calibre RET/OPC Basics

12 month subscription
Access to cloud-based environment for hands-on lab exercises
Access to new training content added during the subscription period
Knowledge assessments to measure learning progress

Starting at
USD $1400.00 / year

Buy

Change this page to

mouse On-Demand Training - Calibre RET/OPC Basics

Description

Explore This On-Demand Training

Content Details

Calibre RET/OPC Basics

Calibre OPCBIAS Training 1 – Syntax and Options

Calibre RET/OPC Basics 8 Chapters

1 Calibre OPCBIAS 5 Topics

2 Calibre RET Modeling - Optical Model 13 Topics

3 Calibre RET Modeling - Compact Resist Model 9 Topics

4 Calibre RET Modeling - VEB Etch Model 8 Topics

5 Calibre nmOPC 21 Topics

6 Calibre nmSRAF 10 Topics

7 Calibre OPCverify 15 Topics

8 Calibre OPC Pro 11 Topics

mouse On-Demand Training - Calibre RET/OPC Basics

On-Demand Training - Calibre RET/OPC Basics

On-Demand Training - Calibre RET/OPC Basics